Characterization of SiGe/Ge heterostructures and graded layers using variable angle spectroscopic ellipsometry [microform] / A.R. Heyd [and others]

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Bibliographic Details
Corporate Author:	United States. National Aeronautics and Space Administration
Other Authors:	Heyd, A. R.
Format:	Government Document Microfilm Book
Language:	English
Published:	[Washington, D.C.] : [Springfield, Va.] : [National Aeronautics and Space Administration] ; [National Technical Information Service, distributor], [1996]
Series:	NASA technical memorandum ; 111685.
Subjects:	Silicon compounds. Superlattices. Germanium compounds. Ellipsometry. Spectroscopic analysis. Strain measurement. Thickness.

Norlin Library - Government Information - Microform

Holdings details from Norlin Library - Government Information - Microform
Call Number:	NAS 1.15:111685
NAS 1.15:111685	Restricted Place a Hold