Handbook of thin film deposition / edited by Krishna Seshan, Dominic Schepis.
Handbook of thin film deposition, Fourth edition, is a comprehensive reference focusing on thin film technologies and applications used in the semiconductor industry and the closely related areas of thin film deposition, thin film micro properties, photovoltaic solar energy applications, materials f...
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| Online Access: |
Full Text (via Knovel) |
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| Other Authors: | , |
| Format: | eBook |
| Language: | English |
| Published: |
Oxford, United Kingdom ; Cambridge, MA, United States :
William Andrew, and imprint of Elsevier,
[2018]
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| Edition: | Fourth edition. |
| Subjects: |
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