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    Electron beam induced damage in PECVD Si₃N₄ and SiO₂ films on InP

    Electron beam induced damage in PECVD Si₃N₄ and SiO₂ films on InP

    Published 1990
    “…Symposium on Dielectric Films on Compound Semiconductors…”
    Government Document Conference Proceeding Microfilm Book
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