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Electron beam induced damage in PECVD Si₃N₄ and SiO₂ films on InP / by Pantic, Dragan M.
Published 1990Call Number: Loading…Online Access
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Electron-beam induced damage in thin insulating films on compound semiconductors by Pantic, Dragan M.
Published 1989Call Number: Loading…
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Electron beam induced damage in PECVD Si₃N₄ and SiO₂ films on InP
Published 1990Other Authors: “…Pantic, Dragan M.…”
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