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    Materials and process characterization for VLSI, 1988 (ICMPC '88) : proceedings of the international conference : Oct. 24-29, 1988, Shanghai, China /

    Materials and process characterization for VLSI, 1988 (ICMPC '88) : proceedings of the international conference : Oct. 24-29, 1988, Shanghai, China /

    Published 1988
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    Conference Proceeding Book
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